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Updated: Jun 17, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
1Division of Applied Physics, National Standards Laboratory, CSIRO, Sydney, Australia.
This study presents a novel method for maintaining optical plate parallelism in scanning Fabry-Perot interferometers. The technique achieves high precision control, crucial for advanced optical measurements.
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