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Updated: Jun 17, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Three-beam holographic interferometry.

M De¹, L Sevigny

¹Laboratoire d'Optique et Hyperfréquences, Université Laval, Québec, P.Q.

|January 12, 2010

Summary

This summary is machine-generated.

A new holographic interferometry technique uses a single exposure with two reference beams. This method offers enhanced sensitivity or simultaneous interferogram and object wave reconstruction.

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Area of Science:

Optics and Photonics
Interferometry
Holography

Background:

Holographic interferometry, pioneered by Stetson and Powell, typically uses a double exposure technique.
Practical applications of holography heavily rely on holographic interferometry.

Purpose of the Study:

To introduce a novel single-exposure holographic interferometry technique.
To explore configurations offering improved sensitivity or simultaneous data retrieval.

Main Methods:

Utilizing two reference beams instead of the customary single reference beam.
Implementing two distinct configurations based on the phase object's placement within the beams.
Single exposure of the photographic emulsion.

Main Results:

One configuration doubles the sensitivity of conventional single-pass interferometers.
The second configuration reconstructs both an interferogram and the original object wave simultaneously.
Experimental validation of both configurations was performed.

Conclusions:

The developed single-exposure technique provides versatile options for holographic interferometry.
This method enhances practical applications by offering increased sensitivity or dual-wave reconstruction.