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Related Experiment Video

Updated: Jun 17, 2026

Multimodal Imaging and Spectroscopy Fiber-bundle Microendoscopy Platform for Non-invasive, In Vivo Tissue Analysis
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Multimodal Imaging and Spectroscopy Fiber-bundle Microendoscopy Platform for Non-invasive, In Vivo Tissue Analysis

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Inverse model of fiber probe aperture size using a non-destructive method.

Zone-Ching Lin1, Ching-Been Yang

  • 1Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan, Republic of China. zclin@mail.ntust.edu.tw

Scanning
|January 14, 2010
PubMed
Summary

This study introduces a non-destructive method to accurately determine fiber probe aperture size using inverse calculation. This technique offers a significant advancement over destructive measurement methods for photolithography applications.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Nanotechnology

Background:

  • Near-field photolithography relies on precise control of optical parameters.
  • Accurate measurement of fiber probe aperture is crucial for lithographic process control.
  • Current destructive measurement methods limit process optimization.

Purpose of the Study:

  • To develop a novel, non-destructive method for inverse calculation of fiber probe aperture size.
  • To establish theoretical line segment fabrication models for near-field photolithography.
  • To validate the inverse calculation model against experimental and SEM data.

Main Methods:

  • Utilized radiation field theory, Dill's exposure model, and Mack's development model.
  • Combined theoretical modeling with experimental data to create an inverse calculation theory.
  • Employed the Levenberg-Marquardt method for optimizing the convergence criterion.

Main Results:

  • The inverse model accurately calculated fiber probe aperture size (d=250.6 nm).
  • Results closely matched Scanning Electron Microscopy (SEM) certified average size (d(avg)=253.4 nm).
  • Demonstrated the ability to predict lithographic fabrication profiles using the inverse model.

Conclusions:

  • The developed non-destructive inverse model provides a reliable and accurate method for fiber probe aperture measurement.
  • This technique overcomes limitations of destructive measurement, offering significant industrial application value.
  • The study contributes a novel approach to fiber probe aperture metrology in photolithography.