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A sensitive half-shadow ellipsometer
Applied Optics
|January 15, 2010
Abstract:
The ellipsometer described herein uses a He-Ne laser as monochromatic light source, and, in the analysis system, a sensitive elliptic detector namely the Bravais-Zakrzewski-Perucca biplate. The use of this biplate allows better accuracy in measurements. Furthermore, a method of measuring and evaluating the results is described which includes, but is not limited to, conventional methods.
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