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Updated: Jun 17, 2026

In situ Grazing Incidence Small Angle X-ray Scattering on Roll-To-Roll Coating of Organic Solar Cells with Laboratory X-ray Instrumentation
Published on: March 2, 2021
Grazing incidence spectrometer with variable angle of incidence.
This study details a versatile grazing incidence spectrometer designed for extreme ultraviolet (EUV) spectroscopy. The instrument achieves high resolution and minimizes spectral contamination, enabling precise measurements of plasma emissions.
Area of Science:
- Atomic and Molecular Physics
- Plasma Physics
- Spectroscopy
Background:
- Grazing incidence spectrometers are crucial for analyzing extreme ultraviolet (EUV) radiation.
- Optimizing grating performance and minimizing higher-order spectral contamination are key challenges in EUV spectroscopy.
Purpose of the Study:
- To describe a novel grazing incidence spectrometer for the 10-600 A wavelength range.
- To demonstrate the instrument's capability to reduce second-order spectral interference.
- To showcase its application in time-resolved plasma emission analysis.
Main Methods:
- Utilized a 1-m concave grating spectrometer with interchangeable 600 lines/mm or 3600 lines/mm gratings.
- Employed a continuously variable angle of incidence (89-80 degrees) to optimize reflectivity and minimize higher-order spectra.
- Incorporated two independent detectors for simultaneous measurement of adjacent spectral lines.
Main Results:
- Demonstrated significant reduction of second-order spectra for C V and O VII lines.
- Achieved a spectral resolution (lambda/Deltalambda) better than 1600 at 66 A.
- Successfully performed time-resolved measurements of N VI and N VII lines from a thetapinch plasma.
Conclusions:
- The developed grazing incidence spectrometer offers enhanced performance for EUV spectral analysis.
- The variable angle of incidence is effective in suppressing unwanted higher-order spectral lines.
- The instrument is well-suited for detailed studies of transient plasma phenomena.
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