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Azimuthal misalignment and surface anisotropy as sources of error in ellipsometry
Applied Optics
|January 23, 2010
Summary
Small errors in ellipsometry polarizer angles can significantly impact optical constant calculations. This study analyzes superficial optical anisotropy
Area of Science:
- Optics and Photonics
- Materials Science
Background:
- Ellipsometry is a key technique for measuring optical properties of surfaces.
- Accurate determination of optical constants relies on precise instrument calibration.
Purpose of the Study:
- To investigate the impact of systematic errors in polarizer zero-angle positions on ellipsometry measurements.
- To analyze the influence of superficial optical anisotropy on ellipsometry and zero-position determination.
- To present a method for detecting optical anisotropy.
Main Methods:
- Ellipsometry was employed to measure the complex refractive index of reflecting surfaces.
- Mathematical analysis was performed to model the effect of polarizer angle errors.
- The influence of superficial optical anisotropy was theoretically analyzed.
Main Results:
- A small systematic error in polarizer zero-angle positions can lead to significant inaccuracies in calculated optical constants.
- Superficial optical anisotropy can disproportionately affect ellipsometry measurements, particularly zero-position calibration.
- A test for the presence of superficial optical anisotropy was developed.
Conclusions:
- Precise calibration of polarizer zero-angle positions is critical for accurate ellipsometry.
- Superficial optical anisotropy is a crucial factor to consider in ellipsometric analysis.
- The presented test aids in identifying and mitigating errors caused by anisotropy.
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