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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

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Silicon nitride as an antireflection coating for semiconductor optics

R A Laff

    Applied Optics
    |January 23, 2010
    PubMed
    Summary

    No abstract available in PubMed .

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