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Multimodal Nonlinear Hyperspectral Chemical Imaging Using Line-Scanning Vibrational Sum-Frequency Generation Microscopy

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Dual channel heterodyne microscope.

¹Samsung Electronics, Mechatronics Center, 416, Maetan-3Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do 442-600, South Korea. proto.vladimir@samsung.com

Journal of Microscopy

|January 26, 2010

Summary

Simultaneous amplitude and phase-contrast imaging of patterned surfaces is achieved using a two-frequency laser beam. This novel technique offers enhanced inspection capabilities and demonstrates super-resolution beyond traditional imaging limits.

Area of Science:

Optics and Photonics
Materials Science
Surface Metrology

Background:

Traditional imaging techniques face limitations in resolution and information content.
Characterizing patterned surfaces requires advanced metrology for detailed inspection.
Amplitude and phase information offer complementary data for surface analysis.

Purpose of the Study:

To develop a novel method for simultaneous amplitude and phase-contrast imaging.
To investigate the potential for super-resolution in phase-contrast imaging.
To enhance the information content for patterned surface inspection.

Main Methods:

Utilizing heterodyne measurement of a cross-polarized two-frequency laser beam.
Reflecting the laser beam from a patterned surface.

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Analyzing both amplitude and phase components of the reflected beam.

Main Results:

Achieved simultaneous imaging in both amplitude-contrast and phase-contrast modes.
Demonstrated that phase-contrast resolution is not limited by beam width.
Experimentally observed super-resolution phenomena.

Conclusions:

Heterodyne measurement enables dual-mode imaging for comprehensive surface inspection.
The technique offers improved spatial resolution beyond conventional methods.
This approach provides valuable insights for advanced material and device characterization.