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Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars
Published on: February 11, 2020
Antireflection Coatings for Silicon in the 2.5-50-microm Region
Applied Optics
|January 30, 2010
Abstract:
It has been found that vacuum-deposited films of CsI, AgCl, TlBr, and TlCl are useful as antireflection coatings for silicon over a broad spectral range in the infrared. Measurements performed on a plane-parallel silicon plate coated with various thicknesses of the above materials yield transmittance values ranging from 99% at lambda = 2.9 microm to 88% at lambda = 27 microm. Experimental details of the coating process and properties of the coatings are discussed.

