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Diffractographic dimensional measurement. Part 2: profile measurement.

T R Pryor, O L Hageniers, W P North

|January 30, 2010

Summary

This summary is machine-generated.

This study introduces a diffractographic profile measurement method. It uses diffraction patterns to assess object profiles, offering speed and automation for accurate measurements.

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Area of Science:

Optics
Metrology
Materials Science

Background:

Diffractography offers precise measurement capabilities.
Previous work demonstrated line measurement using diffraction patterns.
Profile measurement requires advanced techniques for accuracy.

Purpose of the Study:

To present a diffractographic method for profile measurement.
To utilize diffraction patterns for assessing object profiles.
To highlight the advantages of this automated measurement technique.

Main Methods:

Employing a diffractographic technique.
Analyzing diffraction patterns from slit-type apertures.
Measuring changes in separation between adjacent sets of opposite points.

Main Results:

Demonstrated a novel profile measurement capability.
Showcased the method's ability to indicate profile changes.
Validated the speed and accuracy of the diffractographic approach.

Conclusions:

The diffractographic profile measurement method is effective.
The technique offers significant advantages in speed and automation.
This method is suitable for applications requiring precise profile analysis.