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Overview of Microscopy Techniques01:22

Overview of Microscopy Techniques

The early pioneers of microscopy opened a window into the invisible world of microorganisms. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes that leveraged nonvisible light, such as fluorescence microscopy that uses an ultraviolet light source and electron microscopy that uses short-wavelength electron beams. These advances significantly improved magnification, image resolution, and contrast. By comparison, the...

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Stretching Short Sequences of DNA with Constant Force Axial Optical Tweezers
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Published on: October 13, 2011

Microdisplacement sensor using an optically trapped microprobe based on the interference scale.

Masaki Michihata1, Terutake Hayashi, Daisuke Nakai

  • 1Department of Mechanical Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

The Review of Scientific Instruments
|February 2, 2010
PubMed
Summary

This study introduces a novel nanoscale displacement sensor utilizing laser-trapped microspheres and interference scales. It offers high resolution and accuracy for precise microsystem positioning in confined spaces.

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Last Updated: Jun 16, 2026

Stretching Short Sequences of DNA with Constant Force Axial Optical Tweezers
08:48

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Published on: October 13, 2011

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings
08:23

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Published on: September 30, 2019

Area of Science:

  • Microsystems Engineering
  • Nanotechnology
  • Optical Metrology

Background:

  • Accurate positioning is critical for microsystem development.
  • Nanoscale displacement sensing is essential for high-precision positioning devices.

Purpose of the Study:

  • To propose and investigate a new displacement sensor for microsystems.
  • To achieve nanoscale accuracy, wide measuring range, and accessibility for narrow targets.

Main Methods:

  • Employs an interference scale as a linear scale and a laser-trapped microsphere as a sensing probe.
  • Optical trapping of a glass microsphere using laser trapping technique.
  • Measurement of distance based on the shift of the interference scale generated between the target surface and the probe.

Main Results:

  • Achieved a resolution of 10 nm and an accuracy of +/-50 nm.
  • Demonstrated a measurable range of 250 micrometers.
  • Sensor is suitable for target areas smaller than 15 micrometers and inclined surfaces (<15 degrees), identifying displacement direction.

Conclusions:

  • The proposed displacement sensor offers high resolution and accuracy for microsystem positioning.
  • Its design allows for measurements in narrow and inclined target areas.
  • Potential for further improvement by utilizing shorter wavelength trapping lasers.