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Interferometric technique for faceted microstructure metrology using an index matching liquid.

Daryl Purcell1, Amit Suratkar, Angela Davies

  • 1Department of Physics and Optical Science, University of North Carolina at Charlotte, 9201 University City Boulevard, Charlotte, North Carolina 28223, USA. dpurcell@uncc.edu

Applied Optics
|February 2, 2010
PubMed
Summary

A new interferometric technique accurately measures steep, faceted microstructures using index-matching liquid and accounting for refraction. This method enhances metrology for advanced optical products, improving facet angle measurements.

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Area of Science:

  • Optical metrology
  • Microstructure characterization
  • Advanced manufacturing

Background:

  • Microstructured optical products are increasingly common.
  • Many feature steep, faceted surfaces.
  • Current metrology methods are insufficient for these complex structures.

Purpose of the Study:

  • To develop a high-quality, high-speed interferometric technique for measuring faceted microstructures.
  • To improve the accuracy of facet angle measurements on microstructures.
  • To extend metrology capabilities to opaque micro-objects.

Main Methods:

  • Utilized plane wave illumination combined with an index-matching liquid.
  • Incorporated refraction correction at interfaces for precise angle measurement.
  • Applied the technique to micropyramid arrays and opaque microcorner cubes (via replication).

Main Results:

  • Achieved high-quality, high-speed measurements of faceted microstructures.
  • Significantly improved facet angle measurement accuracy by accounting for refraction.
  • Demonstrated good agreement with contact profilometer measurements.
  • Successfully extended the method to opaque microcorner cubes.

Conclusions:

  • The developed interferometric technique offers a robust solution for microstructured optical product metrology.
  • Accurate measurement of steep slopes and facet angles is now feasible.
  • The method provides a valuable tool for quality control and development in micro-optics manufacturing.