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Updated: Jun 16, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
07:47

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

Published on: February 12, 2017

Hologram photoresist noise

J P Kirk

    Applied Optics
    |February 2, 2010
    PubMed
    Abstract

    No abstract available in PubMed .

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