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Updated: Jun 16, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Abstract:
Results of analytical and experimental studies on the elastic deformation of lightweight mirrors under various support conditions are presented and compared. The analytical results were obtained using the finite-element method, which employs elements having stretching, bending, and twisting capability. Both structural deformation and deviation from the best-fit sphere are shown to be dependent upon cell-wall thickness and generally independent of cell shape. This suggests that the choice of cell pattern would be governed by ease of fabrication rather than by structural action, provided that the cell size is made sufficiently small to prevent local waffling.
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