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Channel Optical Waveguides and Directional Couplers in GaAs-lmbedded and Ridged.
Applied Optics
|February 4, 2010
Summary
Proton implantation enabled the fabrication of two-channel imbedded directional couplers, achieving complete light transfer over 2 mm. Ion-micromachining was used to create ridged channel guides, demonstrating a novel directional coupling method.
Area of Science:
- Photonics and optical engineering.
- Semiconductor device fabrication.
Background:
- Directional couplers are fundamental components in integrated photonics for light manipulation.
- Efficient light transfer in compact devices is crucial for miniaturizing optical systems.
Purpose of the Study:
- To demonstrate a novel fabrication method for two-channel imbedded directional couplers.
- To achieve efficient light transfer in short-length devices using proton implantation and ion-micromachining.
Main Methods:
- Fabrication of two-channel imbedded directional couplers using proton implantation.
- Creation of ridged channel guides via ion-micromachining of epitaxial layers.
Main Results:
- Complete light transfer was achieved in a 2 mm directional coupler.
- Demonstration of a viable method for directional coupling using the fabricated components.
Conclusions:
- Proton implantation is an effective technique for fabricating high-performance directional couplers.
- Ion-micromachining offers a precise method for creating optical channel guides for integrated photonic devices.
