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Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films

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Sensitivity of the Ellipsometric Parameters to Angle-of-Incidence Variations.

J R Zeidler, R B Kohles, N M Bashara

|February 6, 2010

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Ellipsometry calculations reveal how errors in angle of incidence significantly impact measurements. Understanding these derivatives helps minimize inaccuracies caused by beam deviation and surface irregularities.

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Area of Science:

Optical Physics
Materials Science
Surface Science

Background:

Ellipsometry is a powerful technique for characterizing thin films.
Accurate measurements depend on precise control of the angle of incidence.
Potential errors can arise from optical component imperfections and sample surface characteristics.

Purpose of the Study:

To present formulas for calculating partial derivatives of ellipsometric parameters (psi and Delta) with respect to the angle of incidence.
To visualize the impact of angle-of-incidence variations on ellipsometric measurements.
To identify critical angular regions where errors are most significant.

Main Methods:

Derivation of analytical formulas for partial derivatives.
3D graphical representation of derivatives versus angle of incidence, refractive indices, and film thickness.
Analysis of error propagation under various experimental conditions.

Main Results:

Partial derivatives of psi and Delta were calculated and plotted.
Graphs highlight angular regions sensitive to angle-of-incidence errors for common materials.
High derivative values indicate susceptibility to errors from beam deviation, non-collimated light, and surface roughness.

Conclusions:

Angle-of-incidence errors are significant in specific angular regions, particularly where derivatives are large.
Beam deviation errors are substantial in zone-averaged measurements with standard optical components.
Accurate ellipsometric analysis requires careful consideration of angle-of-incidence sensitivity and potential error sources.