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Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films
09:32

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Published on: January 26, 2016

Beam deviation errors in ellipsometric measurements; an analysis.

J R Zeidler, R B Kohles, N M Bashara

    Applied Optics
    |February 6, 2010
    PubMed
    Summary
    This summary is machine-generated.

    Beam deviation in ellipsometers causes significant systematic errors, impacting measurements of optical properties. Understanding and correcting these errors, particularly those from varying angles of incidence, is crucial for accurate ellipsometric analysis.

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    Area of Science:

    • Optical Physics
    • Materials Science
    • Surface Science

    Background:

    • Ellipsometry is a powerful technique for characterizing thin films and surfaces.
    • Beam deviation in optical elements can introduce significant errors in ellipsometric measurements.
    • Understanding these errors is critical for accurate material characterization.

    Purpose of the Study:

    • To examine systematic errors caused by beam deviation in ellipsometer optical elements.
    • To identify the primary sources and types of errors associated with beam deviation.
    • To provide methods for measuring and mitigating these errors for improved accuracy.

    Main Methods:

    • Analysis of systematic errors arising from variations in the plane and angle of incidence.
    • Derivation of analytic expressions for incidence variations based on experimental parameters.
    • Description of a method for measuring these parameters.
    • Evaluation of combined beam deviation effects in common ellipsometer configurations.

    Main Results:

    • Two significant error types identified: systematic errors from incidence variation and errors from combined beam displacement and nonuniformities.
    • Azimuthal variation in the angle of incidence fundamentally impacts conventional zone averaging techniques.
    • Analytic expressions and experimental measurement methods for incidence variations are provided.
    • Configurations minimizing beam deviation errors are identified.

    Conclusions:

    • Beam deviation in ellipsometers leads to significant systematic errors, particularly affecting angle and plane of incidence.
    • Conventional zone averaging techniques are susceptible to errors due to azimuthal variations in the angle of incidence.
    • Experimental methods and specific optical configurations can be employed to minimize or cancel these beam deviation errors, enhancing measurement accuracy.