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Updated: Jun 16, 2026
10:28
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Abstract:
A holographic lens has been made that utilizes some of our earlier work on holographic aberration correction [J. E. Ward, D. C. Auth, and F. P. Carlson, Appl. Opt. 10, 896 (1971)]. The lens properties are obtained by interferometrically recording a plane wave and a pinhole generated spherical wave. The theoretical analysis is followed by the results of the Ronchi lens test, Fourier transformation of a grating, and imaging of a test picture.
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