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Updated: Jun 16, 2026
Fabrication of Carbon Nanotube High-Frequency Nanoelectronic Biosensor for Sensing in High Ionic Strength Solutions
Published on: July 22, 2013
DNA-decorated carbon-nanotube-based chemical sensors on complementary metal oxide semiconductor circuitry
Chia-Ling Chen1, Chih-Feng Yang, Vinay Agarwal
1Department of Electrical and Computer Engineering, NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing, Northeastern University, Boston, MA 02115, USA. chen.ch@neu.edu
Abstract:
We present integration of single-stranded DNA (ss-DNA)-decorated single-walled carbon nanotubes (SWNTs) onto complementary metal oxide semiconductor (CMOS) circuitry as nanoscale chemical sensors. SWNTs were assembled onto CMOS circuitry via a low voltage dielectrophoretic (DEP) process. Besides, bare SWNTs are reported to be sensitive to various chemicals, and functionalization of SWNTs with biomolecular complexes further enhances the sensing specificity and sensitivity. After decorating ss-DNA on SWNTs, we have found that the sensing response of the gas sensor was enhanced (up to approximately 300% and approximately 250% for methanol vapor and isopropanol alcohol vapor, respectively) compared with bare SWNTs. The SWNTs coupled with ss-DNA and their integration on CMOS circuitry demonstrates a step towards realizing ultra-sensitive electronic nose applications.
