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Scanning probe nanoscale patterning of highly ordered pyrolytic graphite.

Norimasa Yoshimizu¹, Bryan Hicks, Amit Lal

¹SonicMEMS Laboratory, School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. ny22@cornell.edu

|February 9, 2010

Summary

Precision scanning probe etching achieves highly ordered pyrolytic graphite lithography. Electrochemical etching with temperature control and feedback systems enables sub-200 nm feature precision.

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Area of Science:

Materials Science
Nanotechnology
Surface Science

Background:

Highly ordered pyrolytic graphite (HOPG) is a key material in nanotechnology.
Achieving precise surface modifications on HOPG is crucial for advanced applications.
Existing lithography techniques face limitations in resolution and control.

Purpose of the Study:

To present a novel method for precision scanning probe etching of HOPG.
To investigate the underlying electrochemical mechanism of the etching process.
To demonstrate high-precision pattern fabrication on the nanoscale.

Main Methods:

Utilizing a feedback-controlled atomic force microscope (AFM) for scanning probe etching.
Employing an electrochemical, polarity-dependent, meniscus-mediated etching process.
Optimizing etching temperature and implementing probe tip cleaning for enhanced control.

Main Results:

Demonstrated successful lithography on HOPG via scanning probe etching.
Identified the electrochemical nature of the etching process.
Achieved feature size reduction by 24% through temperature control.
Fabricated an array of 105 trenches with high precision (136 ± 6 nm and 183 ± 5 nm).
Attained a precision of 4.4% and 2.7% over a 2.5 μm x 2.5 μm area.

Conclusions:

Precision scanning probe etching is a viable method for nanoscale fabrication on HOPG.
The electrochemical mechanism allows for controlled and precise surface modification.
Feedback control and optimized conditions are critical for achieving high-fidelity patterns.