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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Douglas H Read1, James E Martin
1Department of Nanomaterials Sciences, Sandia National Laboratories, P.O. Box 5800, Albuquerque, New Mexico 87185-1415, USA. dhread@sandia.gov
We created a novel strain-tunable chemical sensor for detecting volatile organic compounds. Applying tensile strain reversibly enhances sensor sensitivity, allowing for dynamic optimization across a wide concentration range.
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