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Related Experiment Video

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Batch-processed carbon nanotube wall as pressure and flow sensor.

Jungwook Choi1, Jongbaeg Kim

  • 1School of Mechanical Engineering, Yonsei University, 262 Seongsanno, Seodaemun-gu, Seoul 120-749, Republic of Korea.

Nanotechnology
|February 16, 2010
PubMed
Summary

This study introduces a novel carbon nanotube (CNT) wall sensor for measuring vacuum pressure and gas flow velocity. The sensor utilizes the electrothermal-thermistor effect for sensitive detection across a wide range.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Sensor Technology

Background:

  • Carbon nanotube (CNT) materials exhibit unique electrical and thermal properties.
  • Developing efficient sensors for vacuum pressure and gas flow is crucial for various scientific and industrial applications.
  • Existing sensors may have limitations in range, sensitivity, or fabrication complexity.

Purpose of the Study:

  • To present a novel pressure and flow sensor utilizing batch-processed carbon nanotube walls.
  • To investigate the electrothermal-thermistor effect for sensing vacuum pressure and gas flow velocity.
  • To demonstrate a high-throughput and high-yield fabrication method for CNT-based sensors.

Main Methods:

  • Synthesis of CNT walls via thermal chemical vapor deposition (CVD) on a silicon-on-insulator (SOI) wafer.

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  • Fabrication of microelectrodes and self-assembly of CNTs across a buried oxide layer.
  • Utilizing the negative temperature coefficient of resistance (TCR) of CNTs and temperature-dependent tunneling for sensing.

    • Main Results:

    • The sensor successfully measured vacuum pressure in the range of 3 x 10(-3) to 10(5) Pa.
    • Nitrogen gas flow velocity was detected within the range of 1 to 52.4 mm s(-1).
    • The sensor demonstrated a bias voltage-dependent response suitable for vacuum pressure gauging.

    Conclusions:

    • Batch-processed CNT walls offer a viable platform for sensitive vacuum pressure and gas flow sensing.
    • The electrothermal-thermistor effect in CNTs provides a robust mechanism for gas molecule interaction detection.
    • The presented fabrication method ensures high throughput and yield for scalable sensor production.