Laser tuners using circular piezoelectric benders

This paper presents the results of an experimental evaluation of a new type of piezoelectric ceramic device designed for use as a laser mirror tuner. Thin plates made from various materials were assembled into a circular bimorph configuration and tested for linearity of movement, maximum travel, and resonant frequency for varying conditions of clamping torque and mirror loading values. Most of the devices tested could accept mirror diameters up to approximately 1.3 cm and maintain a resonant frequency above 2 KHz. Typical mirror translation without measurable tilt was +/-20 microm or greater for applied voltages of less than +/-300 V.