You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Jun 16, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A novel interferometric method for testing optical surfaces is presented, leveraging holography. This technique offers a new approach to optical metrology and surface characterization.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: