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Updated: Jun 16, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Composite block polymer-microfabricated silicon nanoporous membrane.

Eric E Nuxoll1, Marc A Hillmyer, Ruifang Wang

  • 1Department of Pharmaceutics, University of Minnesota, Minneapolis, Minnesota 55455, USA.

ACS Applied Materials & Interfaces
|February 18, 2010
PubMed
Summary

We created a robust composite membrane using block polymers and silicon substrates. This membrane offers precise nanoscale filtration for advanced medical devices.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Biomedical Engineering

Background:

  • Block polymers enable the creation of nanoscale pores for filtration.
  • Thin films of block polymers are mechanically fragile, limiting their use as membranes.
  • A need exists for robust membranes with controlled pore sizes for biomedical applications.

Purpose of the Study:

  • To fabricate and characterize a novel composite membrane integrating block polymers with a silicon substrate.
  • To evaluate the mechanical integrity and transport properties of the developed composite membrane.
  • To assess the suitability of this composite membrane for interfacing with biological systems.

Main Methods:

  • Fabrication of a composite membrane by integrating a block polymer film with a thin silicon substrate.
Keywords:
MEMSblock polymermembranenanoporoussize selectivity

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  • Mechanical integrity testing of the composite membrane.
  • Evaluation of transport properties using model solutes of varying molecular weights.

    • Main Results:

    • The composite membrane exhibits nanoscale size exclusion capabilities.
    • Fast transport of small molecules is achieved through the membrane.
    • The membrane demonstrates mechanical robustness due to the silicon substrate support.

    Conclusions:

    • The composite membrane provides a stable platform for nanoscale filtration.
    • Its properties make it suitable for implantable sensing and drug-delivery devices.
    • Potential for surface modification enhances its versatility for biological interfacing.