Related Experiment Video
Updated: Jun 16, 2026

10:25
Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
The Columbia University Sub-micron Charged Particle Beam
Gerhard Randers-Pehrson1, Gary W Johnson, Stephen A Marino
1Center for Radiological Research, Columbia University, New York,, NY 10032, USA.
Summary
Researchers developed a novel electrostatic quadrupole lens system to focus helium ions to a 0.8 µm spot. This advanced ion beam focusing technology enhances precision in accelerator applications.
Area of Science:
- Physics
- Accelerator Science
- Ion Optics
Background:
- High-precision ion beam focusing is crucial for various applications in physics and materials science.
- Existing electrostatic lens systems face limitations in achieving sub-micrometer beam spot sizes and energy versatility.
Purpose of the Study:
- To design and construct a novel electrostatic quadrupole lens system for precise focusing of charged particles.
- To achieve sub-micrometer beam spot sizes for applications requiring high spatial resolution.
Main Methods:
- Designed and constructed a lens system using two electrostatic quadrupole triplets.
- Employed precise construction for alignment and varied element lengths for quadrupole strength control.
- Utilized ion implantation in insulating sections to enhance voltage stability.
Main Results:
- Successfully focused 6-MeV helium-4 ions to a beam spot with a 0.8 µm diameter in air.
- The system is capable of focusing helium-4 ions up to 10 MeV and protons up to 5 MeV.
- The novel design allows for nearly identical voltage magnitudes across quadrupoles.
Conclusions:
- The developed electrostatic quadrupole lens system achieves unprecedented sub-micrometer focusing for MeV ions.
- The innovative design and construction techniques offer improved voltage stability and operational versatility.
- This technology has significant potential for advancing research in accelerator physics and related fields.
Related Concept Videos
Subatomic Particles
Dalton was only partially correct about the particles that make up matter. All matter is composed of atoms, and atoms are composed of three smaller subatomic particles: protons, neutrons, and electrons. These three particles account for the mass and the charge of an atom.
Thomson's e/m Experiment
In a beam of charged particles created by a heated cathode, the particles move at different speeds. However, many applications need a beam with uniform particle speeds. An arrangement known as a velocity selector uses electric and magnetic fields to pick particles with a particular speed from the beam.
A particle with charge q, speed v, and mass m enters an area from the top, where the magnetic and electric fields are perpendicular both to the particle's motion and to one another. The magnetic...
A particle with charge q, speed v, and mass m enters an area from the top, where the magnetic and electric fields are perpendicular both to the particle's motion and to one another. The magnetic...
Transmission Electron Microscopy
In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400 keV in...
Nuclear Transmutation
Nuclear transmutation is the conversion of one nuclide into another. It can occur by the radioactive decay of a nucleus, or the reaction of a nucleus with another particle. The first manmade nucleus was produced in Ernest Rutherford’s laboratory in 1919 by a transmutation reaction, the bombardment of one type of nuclei with other nuclei or with neutrons. Rutherford bombarded nitrogen-14 atoms with high-speed α particles from a natural radioactive isotope of radium and observed protons being...
