Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: Jun 16, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
05:57

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Integrated optical silicon photodiode array.

J T Boyd, C L Chen

    Applied Optics
    |February 19, 2010
    PubMed
    Summary
    This summary is machine-generated.

    Integrated optical photodiode arrays were designed and fabricated using silicon p-i-n junctions. These devices achieve high optical energy absorption and 80% quantum efficiency, showing promise for optical detection applications.

    Related Concept Videos

    You might also read

    Related Articles

    Articles linked to this work by shared authors, journal, and citation graph.

    Sort by
    Same author

    Telomerase activity in rat liver allografts.

    Transplantation·2001
    Same author

    Multiorgan nuclear factor kappa B activation in a transgenic mouse model of systemic inflammation.

    American journal of respiratory and critical care medicine·2000
    Same author

    Highly sensitive liquid chromatography-electrospray mass spectrometry (LC-MS) method for the determination of etoposide levels in human serum and plasma.

    Journal of chromatography. B, Biomedical sciences and applications·2000
    Same author

    [Glucose isomerase gene knock-out by denatured double-stranded DNA].

    Yi chuan xue bao = Acta genetica Sinica·2000
    Same author

    International sharing of split liver grafts in Asia: initial experience.

    Clinical transplantation·2000
    Same author

    Segment inertial properties of Chinese adults determined from magnetic resonance imaging.

    Clinical biomechanics (Bristol, Avon)·2000
    Same journal

    Multifunctional reconfigurable terahertz metasurface based on vanadium dioxide phase transition: achieving broadband absorption and efficient polarization conversion.

    Applied optics·2026
    Same journal

    High-Q-factor electromagnetically induced transparency utilizing quasi-bound states in the continuum in an all-dielectric terahertz metasurface.

    Applied optics·2026
    Same journal

    Automated stitching interferometry for high-precision metrology of X-ray mirrors.

    Applied optics·2026
    Same journal

    Experimental demonstration of an approach to designing a metal-dielectric DBR resonant cavity structure.

    Applied optics·2026
    Same journal

    High-precision wavefront reconstruction from a single-shot interferogram using a physics-driven hybrid feature calibration network.

    Applied optics·2026
    Same journal

    Ultra-high-Q Fano resonance based on coupled topological corner states in Kagome photonic crystals.

    Applied optics·2026
    See all related articles

    Area of Science:

    • Optoelectronics
    • Semiconductor device physics
    • Integrated photonics

    Background:

    • Silicon p-i-n photodiodes are crucial for optical detection.
    • Efficient light coupling into photodetectors is essential for high performance.
    • Integrated optical systems require compact and efficient photodiode arrays.

    Purpose of the Study:

    • To design, fabricate, and operate integrated optical photodiode arrays in silicon.
    • To optimize light coupling from a KPR waveguide to silicon p-i-n photodiodes.
    • To achieve high optical energy absorption and quantum efficiency in the photodetector.

    Main Methods:

    • Device design and fabrication of silicon p-i-n junction photodiodes.
    • Integration of a KPR waveguide on a SiO(2) substrate.

    More Related Videos

    Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors
    09:59

    Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

    Published on: June 23, 2018

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
    09:03

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

    Published on: January 7, 2019

    Related Experiment Videos

    Last Updated: Jun 16, 2026

    Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
    05:57

    Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

    Published on: April 1, 2020

    Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors
    09:59

    Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

    Published on: June 23, 2018

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
    09:03

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

    Published on: January 7, 2019

  • Light coupling via evanescent field or multiple refraction into the detector.
  • Measurement of device quantum efficiency.

    • Main Results:

    • Nearly 100% incident optical energy absorption in the photodiode depletion region.
    • Fabricated devices achieved a measured quantum efficiency of 80%.
    • Comparison with a theoretical quantum efficiency of 93%.

    Conclusions:

    • The developed waveguide-photodiode structure enables efficient light absorption.
    • The achieved 80% quantum efficiency demonstrates the viability of integrated silicon photodiode arrays.
    • Further optimization could bridge the gap between measured and theoretical quantum efficiency.