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Updated: Jun 16, 2026

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores
09:43

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores

Published on: October 31, 2013

Controlling nanopore size, shape and stability.

Michiel van den Hout1, Adam R Hall, Meng Yue Wu

  • 1Faculty of Applied Sciences, Delft University of Technology, Delft, The Netherlands.

Nanotechnology
|February 23, 2010
PubMed
Summary
This summary is machine-generated.

Researchers found that transmission electron microscope (TEM) beam size controls solid-state nanopore shape and stability. Optimal nanopore stability for biological molecule analysis is achieved when TEM beam size matches the target nanopore diameter.

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Last Updated: Jun 16, 2026

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Biophysics

Background:

  • Solid-state nanopores are valuable for biological polymer analysis (DNA, RNA) due to tunable size, device integration, and robustness.
  • Precise control over nanopore geometry is crucial for reliable measurements.

Purpose of the Study:

  • To investigate the impact of transmission electron microscope (TEM) beam size on the fabrication and stability of small solid-state nanopores.
  • To establish guidelines for creating stable nanopores for biological applications.

Main Methods:

  • Fabrication of solid-state nanopores (approx. 5 nm diameter in 20 nm SiN membranes) using TEM beams of varying sizes.
  • Characterization of nanopore shape and dimensions using (scanning) transmission electron microscopy (S)TEM.
  • Assessment of nanopore stability by measuring electrical resistance before and after immersion in aqueous solution.
  • Utilizing thermal oxidation for independent nanopore size control post-fabrication.

Main Results:

  • TEM beam size precisely controls the 3D geometry of small nanopores.
  • Nanopore stability in aqueous solution is directly related to its 3D geometry, influenced by TEM beam size during fabrication.
  • Optimal nanopore stability is achieved when the TEM beam diameter closely matches the desired nanopore diameter.
  • Thermal oxidation offers an effective method for post-fabrication nanopore size adjustment.

Conclusions:

  • The 3D geometry, dictated by TEM beam size, is critical for the stability of solid-state nanopores.
  • Matching TEM beam size to nanopore diameter is key for fabricating robust nanopores for biological studies.
  • Thermal oxidation provides an additional tool for refining nanopore dimensions, enhancing their utility for analyzing nucleic acids and small proteins.