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Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold.

Xinyuan Dou1, Xiaolong Wang, Haiyu Huang

  • 1Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, 78758, USA.

Optics Express
|February 23, 2010
PubMed
Summary

This study details the creation of a nickel mold for fabricating polymer waveguides with precise 45-degree tilted micro-mirrors using electroplating and UV imprinting. The resulting optical components demonstrate low insertion and propagation losses, indicating high performance for integrated optics.

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Area of Science:

  • Materials Science
  • Optical Engineering
  • Nanotechnology

Background:

  • Fabrication of precise micro-optical components is crucial for integrated photonics.
  • Existing methods for creating micro-mirrors in waveguides often face challenges in precision and repeatability.
  • Nickel-based molds offer a durable and cost-effective solution for mass production.

Purpose of the Study:

  • To develop a novel electroplating method for fabricating nickel molds with 45-degree tilted surfaces.
  • To investigate the use of these molds in UV imprinting for creating polymer waveguide arrays with integrated micro-mirrors.
  • To characterize the optical performance of the fabricated waveguide arrays, focusing on insertion loss, propagation loss, and coupling efficiency.

Main Methods:

  • Electroplating of a nickel-based metal mold with precisely 45-degree tilted surfaces using a SU-8 layer exposed under de-ionized water.
  • UV imprinting of a polymeric waveguide array utilizing the fabricated metallic mold.
  • Optical characterization including measurement of total insertion loss, propagation loss, and coupling efficiency.

Main Results:

  • Achieved repeatable error control of 0.5 degrees for the 45-degree tilted angle during mold fabrication.
  • Successfully fabricated polymeric waveguide arrays with 45-degree micro-mirrors via UV imprinting.
  • Observed total insertion losses of approximately 4dB, propagation losses of around 0.18dB/cm, and a coupling efficiency of 75%.

Conclusions:

  • The electroplating and UV imprinting process enables the precise fabrication of nickel molds for optical applications.
  • The developed method allows for the creation of polymer waveguide arrays with integrated 45-degree micro-mirrors, exhibiting favorable optical performance.
  • This technique holds potential for advancing integrated photonic devices requiring efficient light manipulation and coupling.