Adaptive optics for direct laser writing with plasma emission aberration sensing

Alexander Jesacher1, Graham D Marshall, Tony Wilson

  • 1Department of Engineering Science, University of Oxford, Oxford, United Kingdom.

Optics Express
|February 23, 2010
PubMed
Summary

Adaptive optics correct laser writing aberrations using plasma supercontinuum feedback. This enables precise nanostructure fabrication by improving focal spot quality through aberration correction.