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Atomic Force Microscopy
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Updated: Jun 16, 2026

Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-Pérot Etalon
Published on: February 3, 2023
Shyh-Tsong Lin1, Sheng-Lih Yeh, Zhi-Feng Lin
1Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec 3, Chung-Hsiao East Road, Taipei 10608, Taiwan. f10402@ntut.edu.tw
This study introduces a new angular probe for precise angle measurements. The Fabry-Perot etalon-based system demonstrates high resolution, sensitivity, and accuracy for angular displacement determination.
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