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Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters
Published on: July 8, 2013
Next generation 1.5 microm terahertz antennas: mesa-structuring of InGaAs/InAlAs photoconductive layers
H Roehle1, R J B Dietz, H J Hensel
1Fraunhofer Institute for Telecommunications, Heinrich-Hertz-Institut, Einsteinufer 37, 10587 Berlin, Germany. roehle@hhi.fraunhofer.de
Optics Express
|February 23, 2010
Summary
Mesa-structuring of InGaAs/InAlAs layers using chemical assisted ion beam etching significantly improved terahertz photoconductive antennas. These antennas show order-of-magnitude gains in emitter power, reduced dark current, and enhanced receiver sensitivity for 1.5 micrometer operation.
Area of Science:
- Optoelectronics
- Semiconductor device fabrication
- Terahertz (THz) technology
Background:
- Photoconductive antennas (PCAs) are crucial for generating and detecting terahertz (THz) radiation.
- Traditional planar PCAs face limitations in performance, including low emitter power and high dark currents.
- The development of advanced materials and fabrication techniques is essential for improving PCA efficiency.
Purpose of the Study:
- To investigate the impact of mesa-structuring on InGaAs/InAlAs photoconductive layers for THz applications.
- To fabricate and evaluate novel terahertz photoconductive antennas operating at 1.5 micrometers.
- To demonstrate performance enhancements compared to conventional planar antennas.
Main Methods:
- Mesa-structuring of InGaAs/InAlAs heterostructures was achieved using chemical assisted ion beam etching (CAIBE).
- Terahertz photoconductive antennas were fabricated utilizing the mesa-structured layers.
- Antenna performance was characterized using a time-domain spectrometer (TDS).
Main Results:
- Mesa-structured InGaAs/InAlAs PCAs exhibited order-of-magnitude improvements in emitter power.
- Significant reductions in dark current were observed for the fabricated antennas.
- Receiver sensitivity was substantially enhanced compared to planar antenna designs.
Conclusions:
- Mesa-structuring via CAIBE is a highly effective method for enhancing the performance of InGaAs/InAlAs based THz photoconductive antennas.
- The developed antennas offer superior performance metrics, paving the way for more efficient THz systems operating at 1.5 micrometers.
- This advancement holds promise for various THz applications requiring high-power and sensitive detection.
