Laser differential confocal radius measurement
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Near Simultaneous Laser Scanning Confocal and Atomic Force Microscopy (Conpokal) on Live Cells
Published on: August 11, 2020
Weiqian Zhao1, Ruoduan Sun, Lirong Qiu
1Key Laboratory of Photoelectronic Imaging Technology and System Ministry of Education of China,Opto-Electronic College, Beijing Institute of Technology, Beijing 100081, China. zwq669@126.com
Abstract:
A new laser differential confocal radius measurement (DCRM) is proposed for high precision measurement of radius. Based on the property of an axial intensity curve that the absolute zero precisely corresponds to the focus of the objective in a differential confocal system (DCS), DCRM uses the zero point of the DCS axial intensity curve to precisely identify the cat's-eye and confocal positions of the test lens, and measures the accurate distance between the two positions to achieve the high-precision measurement of radius of curvature (ROC). In comparison with the existing measurement methods, DCRM proposed has a high measurement precision, a strong environmental anti-interference capability and a low cost. The theoretical analyses and preliminary experimental results indicate that DCRM has a relative measurement error of better than 5 ppm.

