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Laser differential confocal radius measurement.

Weiqian Zhao1, Ruoduan Sun, Lirong Qiu

  • 1Key Laboratory of Photoelectronic Imaging Technology and System Ministry of Education of China,Opto-Electronic College, Beijing Institute of Technology, Beijing 100081, China. zwq669@126.com

Optics Express
|February 23, 2010
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Summary
This summary is machine-generated.

A novel laser differential confocal radius measurement (DCRM) method precisely measures radius of curvature (ROC). This technique offers high accuracy, environmental stability, and cost-effectiveness for optical component metrology.

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Area of Science:

  • Optical Metrology
  • Precision Engineering
  • Laser Measurement Systems

Background:

  • Accurate radius of curvature (ROC) measurement is critical in optical manufacturing.
  • Existing methods face limitations in precision, environmental stability, and cost.

Purpose of the Study:

  • To introduce a new laser differential confocal radius measurement (DCRM) technique.
  • To achieve high-precision measurement of radius of curvature (ROC).

Main Methods:

  • Utilizes a differential confocal system (DCS) and its axial intensity curve.
  • Identifies cat's-eye and confocal positions using the DCS zero point.
  • Measures the distance between these positions for ROC determination.

Main Results:

  • The DCRM method demonstrates high measurement precision.
  • Exhibits strong environmental anti-interference capabilities.
  • Preliminary experiments show a relative measurement error better than 5 ppm.

Conclusions:

  • DCRM offers a precise, robust, and economical approach for ROC measurement.
  • The method is suitable for demanding optical metrology applications.
  • Validated by theoretical analysis and experimental results.