Highly sensitive silicon microring sensor with sharp asymmetrical resonance
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Updated: Jun 16, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Huaxiang Yi1, D S Citrin, Zhiping Zhou
1State Key Laboratory on Advanced Optical Communication Systems and Networks, Peking University, Beijing 100871, China.
Abstract:
We analyze the resonance spectrum in silicon microring resonators taking into account the end-facet reflection from a coupled waveguide, which can provide a dense set of Fabry-Perot resonances. Based on the simple configuration of a microring coupled with a waveguide, the resulting asymmetric Fano-like non-Lorentzian resonance is obtained by scattering theory and experiment. Enhanced sensing performance with steeper slope to the resonance is theoretically predicted and experimentally demonstrated for a 10-microm racetrack silicon microring resonator. A high sensitivity of approximately 10(-8) RIU in terms of the detection limit is obtained in a 30-dB signal-to-noise ratio (SNR) system.

