Updated: Jun 16, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Huaxiang Yi1, D S Citrin, Zhiping Zhou
1State Key Laboratory on Advanced Optical Communication Systems and Networks, Peking University, Beijing 100871, China.
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We analyzed silicon microring resonators, revealing that waveguide reflections create asymmetric Fano resonances. This design enhances sensing performance, achieving a detection limit of 10(-8) refractive index units (RIU).
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