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Fabrication and Testing of Microfluidic Optomechanical Oscillators

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Reducing anchor loss in micromechanical extensional mode resonators.

Vahdettin Taş¹, Selim Olcum, M Deniz Aksoy

¹Electronics Engineering Department, Bilkent University, Ankara, Turkey. vtas@ee.bilkent.edu.tr

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|February 25, 2010

Summary

This study introduces a novel micromechanical resonator design to significantly boost the quality factor (Q). The innovative structure minimizes energy loss to the substrate, enabling high-performance filters and oscillators.

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Area of Science:

Microelectromechanical Systems (MEMS)
Solid-State Physics
Electrical Engineering

Background:

Micromechanical resonators are crucial for filters and oscillators.
Reducing energy loss (anchor loss) is key to improving resonator quality factor (Q).
Existing designs often suffer from significant substrate-coupled losses.

Purpose of the Study:

To propose a novel micromechanical resonator topology.
To enhance the quality factor (Q) of extensional mode resonators.
To ensure suitability for silicon-based fabrication processes.

Main Methods:

Finite element simulations were used to analyze resonator performance.
A novel resonator structure with alternating bars was designed.
An equivalent electrical circuit model was developed for performance prediction.

Main Results:

The proposed design significantly reduces anchor loss through impedance mismatch.
Finite element simulations confirmed the effectiveness of the topology.
The electrical model accurately predicted simulation results, showing high potential Q.

Conclusions:

The novel resonator design effectively minimizes anchor loss.
This topology is compatible with silicon-based microfabrication.
The proposed micromechanical resonators are expected to achieve very high Q factors.