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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Aberration of a negative ion beam caused by space charge effect

K Miyamoto1, S Wada, A Hatayama

  • 1Naruto University of Education, 748 Nakashima, Takashima, Naruto-cho, Naruto-shi, Tokushima 772-8502, Japan. kmiyamot@naruto-u.ac.jp

The Review of Scientific Instruments
|March 3, 2010
PubMed

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