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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Preliminary studies on space charge compensation by analyzing residual argon gas ion signals

P N Lu1, S X Peng, H T Ren

  • 1State Key Laboratory of Nuclear Physics and Technology and Institute of Heavy Ion Physics, Peking University, Beijing 100871, China.

The Review of Scientific Instruments
|March 3, 2010
PubMed

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