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Cryogenic Liquid Jets for High Repetition Rate Discovery Science
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Laser-plasma debris from a rotating cryogenic-solid-Xe target.

Sho Amano1, Yutaka Inaoka, Hiroki Hiraishi

  • 1Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako-gun, Hyogo 678-1205, Japan.

The Review of Scientific Instruments
|March 3, 2010
PubMed
Summary

Laser plasma debris from solid xenon (Xe) targets damages optics. Reducing laser pulse energy mitigates ice fragment damage, and a rotating target reduces high-energy ions, improving optic lifetime for extreme ultraviolet (EUV) sources.

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Area of Science:

  • Optics and Photonics
  • Plasma Physics
  • Materials Science

Background:

  • Laser-produced plasma sources are crucial for extreme ultraviolet (EUV) lithography.
  • Optics damage from plasma debris is a significant challenge in developing reliable EUV sources.
  • Solid targets, like xenon, are used in EUV generation, but debris characteristics require detailed investigation.

Purpose of the Study:

  • To characterize laser plasma debris from solid xenon targets used in an EUV source.
  • To understand the composition and energy of debris particles and their impact on optical components.
  • To evaluate mitigation strategies and compare solid targets with liquid targets for EUV generation.

Main Methods:

  • Development of a rotating drum solid xenon target for EUV generation.

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  • Analysis of debris composition (ions, neutrals, fragments) using plasma diagnostics.
  • Measurement of ion energy distribution and sputtering rates on mirror samples.
  • Comparison of solid target performance with liquid jet targets.

    • Main Results:

    • Plasma debris primarily consists of fast ions, with fewer neutral particles.
    • Ice fragments from solid xenon targets cause damage, but this is preventable by reducing laser pulse energy.
    • A rotating target reduces high-energy ions via a gas curtain effect, decreasing sputtering rates.
    • Estimated Mo/Si mirror sputtering rate is 104 nm/1x10^6 shots; reflectivity shows no significant degradation up to 1x10^6 shots.
    • Solid and liquid xenon targets exhibit similar sputtering rates per conversion efficiency.

    Conclusions:

    • Solid xenon targets on a rotating drum are a viable option for EUV sources due to high conversion efficiency (0.9%).
    • Mitigation of ion debris through gas or magnetic fields can further enhance mirror lifetime.
    • The rotating solid target technique offers a promising pathway for developing advanced laser plasma EUV sources.