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Related Experiment Video

Updated: Jun 15, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Measurement of steep aspheric surfaces.

J G Dil, P F Greve, W Mesman

|March 4, 2010

Summary

This study introduces a novel holographic comparison method for precisely measuring the shape of high numerical aperture aspheric surfaces. This technique ensures high reproducibility in aspheric surface fabrication with minimal measurement error.

Area of Science:

Optical Engineering
Metrology
Surface Science

Background:

Accurate measurement of aspheric surfaces is critical for advanced optical systems.
High numerical aperture (NA) optics present unique metrology challenges due to steep slopes.
Existing methods may lack the precision or adaptability for complex aspheric geometries.

Purpose of the Study:

To develop and validate a precise method for measuring high NA aspheric surfaces.
To assess the reproducibility of aspheric surface fabrication using a novel technique.
To achieve measurement errors below 0.1 micrometers for convex and concave aspheres.

Main Methods:

A two-step measurement process is employed.
Step 1: Standard metrology to establish a reference surface.

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Step 2: Holographic comparison to evaluate fabrication reproducibility, accommodating slopes up to 1200 waves/rad.

Main Results:

The holographic comparison method demonstrates high precision for aspheric surface measurement.
The method successfully measures surfaces with high numerical apertures (NA < 0.95).
Achieved measurement errors are consistently below 0.1 micrometers.

Conclusions:

The described holographic method offers a robust solution for metrology of challenging aspheric optics.
This technique enables reliable assessment of aspheric surface fabrication reproducibility.
The high accuracy and precision are suitable for demanding optical manufacturing applications.