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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Interferometric testing with computer-generated holograms: aberration balancing method and error analysis.

T Yatagai, H Saito

    Applied Optics
    |March 4, 2010
    PubMed
    Summary
    This summary is machine-generated.

    This study addresses challenges in testing aspheric surfaces using computer-generated holograms. It introduces an aberration balancing method to reduce hologram resolution cells by up to 25%, improving accuracy in optical testing.

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    Last Updated: Jun 15, 2026

    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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    Published on: July 5, 2016

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    Digital Inline Holographic Microscopy (DIHM) of Weakly-scattering Subjects
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    Digital Inline Holographic Microscopy (DIHM) of Weakly-scattering Subjects

    Published on: February 8, 2014

    Area of Science:

    • Optical Engineering
    • Metrology
    • Holography

    Background:

    • Computer-generated holograms (CGHs) are crucial for testing optical surfaces.
    • Challenges exist in CGH accuracy and efficiency for complex optics like aspheres.

    Purpose of the Study:

    • To compare Lohmann and interference types of CGHs.
    • To develop methods for reducing CGH resolution cell requirements for testing aspheric surfaces.
    • To analyze errors associated with CGH testing methods.

    Main Methods:

    • Phase error estimation and compensation for Lohmann holograms.
    • Analysis of wavefront shape and hologram resolution cell relationship.
    • Development and application of the aberration balancing method.
    • Calculation of optimum defocus aberration values.
    • Investigation of errors from hologram size and misalignment.

    Main Results:

    • A method for compensating phase error in Lohmann holograms is presented.
    • The aberration balancing method can reduce hologram resolution cells by up to 25%.
    • Errors due to incorrect hologram size and misalignment were analyzed.

    Conclusions:

    • The aberration balancing method effectively reduces CGH resolution cell requirements for aspheric surface testing.
    • The study provides insights into optimizing CGH parameters and mitigating testing errors.
    • Experimental validation was demonstrated for a 150 mm aspheric mirror.