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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Recent progress and patents in silicon nanotubes.
Li Z Pei1, Shang B Wang, Chuan G Fan
1School of Materials Science and Engineering, Key Lab of Materials Science and Processing of Anhui Province, School of Metallurgy and Resources, Anhui University of Technology, Ma'anshan, Anhui 243002, P. R. China. lzpei1977@163.com
Recent Patents on Nanotechnology
|March 11, 2010
Summary
Silicon nanotubes offer promising applications in electronics and energy storage. This review covers recent advancements and patents in their synthesis and use, particularly in field-effect transistors and lithium-ion batteries.
Area of Science:
- Materials Science
- Nanotechnology
- Chemistry
Background:
- Silicon nanotubes are a novel class of silicon nanomaterials.
- They show potential in various advanced applications.
Purpose of the Study:
- To review recent progress and patents in silicon nanotube synthesis and applications.
- To highlight the potential of silicon nanotubes in emerging technologies.
Main Methods:
- Review of synthesis methods including template-assisted, hydrothermal, electrochemical deposition, plasma, and laser ablation.
- Analysis of experimental applications and patents in field-effect transistors and lithium-ion batteries.
Main Results:
- Progress in diverse synthesis techniques for silicon nanotubes is demonstrated.
- Key applications in field-effect transistors and lithium-ion batteries are discussed with patent insights.
Conclusions:
- Silicon nanotubes have significant potential in magnetic nanodevices, hydrogen storage, and electron/field-emitting devices.
- Future development directions for silicon nanotube synthesis and practical applications are outlined.
