Related Experiment Video
Updated: Jun 15, 2026

10:28
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Abstract:
An interferometric technique for hologram repositioning is described where the hologram is compared with the interference pattern of the reference and object waves. Analytical expressions to evaluate the accuracy of the repositioning are presented for the method. Two applications of the method in metrology for micromovement measurements are proposed.

