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Related Concept Videos

X-ray Diffraction of Biological Samples01:10

X-ray Diffraction of Biological Samples

X-ray diffraction or XRD is an analytical tool that utilizes X-rays to study ordered structures such as crystalline organic and inorganic samples, polycrystalline materials, proteins, carbohydrates, and drugs.
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Updated: Jun 15, 2026

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
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Rectangular-profile diffraction grating from single-crystal silicon.

M Josse, D L Kendall

    Applied Optics
    |March 11, 2010
    PubMed
    Summary
    This summary is machine-generated.

    Chemically etched silicon diffraction gratings with precise rectangular profiles were created. These gratings exhibited excellent structural form, showing significant variation in specularly reflected light across visible wavelengths.

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    Area of Science:

    • Materials Science
    • Optics
    • Nanotechnology

    Background:

    • Diffraction gratings are crucial optical components.
    • Fabrication of high-quality gratings with precise profiles is essential for advanced optical applications.
    • Silicon-based nanostructures offer unique optoelectronic properties.

    Purpose of the Study:

    • To fabricate well-shaped rectangular profile diffraction gratings using chemical etching.
    • To characterize the diffraction behavior of these silicon gratings.
    • To demonstrate the high fidelity of the fabricated structures.

    Main Methods:

    • Single-crystal silicon oriented in the <110> direction was used.
    • Chemical etching was employed to create grooves with specific dimensions (2.62 µm depth, 5.4 µm width, 10.2 µm pitch).
    • Diffraction efficiency was measured near normal incidence using multiple laser wavelengths.

    Main Results:

    • Diffraction gratings with well-defined rectangular profiles were successfully fabricated.
    • The specularly reflected (zero-order) beam intensity varied by at least a factor of 140 across different visible wavelengths.
    • This significant variation confirmed the excellent geometric form and uniformity of the etched structures.

    Conclusions:

    • Chemical etching of <110> silicon is a viable method for producing high-quality diffraction gratings.
    • The fabricated gratings exhibit excellent optical performance due to their precise structural geometry.
    • These results pave the way for advanced silicon-based diffractive optical elements.