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Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips.

Limu Wang¹, Mengying Zhang, Min Yang

¹Department of Physics and KAUST-HKUST MicroNano-fluidics Joint Laboratory, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, People's Republic of China.

Biomicrofluidics

|March 11, 2010

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A new polydimethylsiloxane (PDMS) microfluidic pressure sensor offers direct electrical output. This integrated sensor demonstrates a fast response time and wide pressure range, suitable for microfluidic systems.

Area of Science:

Materials Science
Microfluidics
Sensor Technology

Background:

Microfluidic devices require precise pressure monitoring.
Integration of sensors into polydimethylsiloxane (PDMS) chips presents bonding challenges.
Existing pressure sensors may lack direct electrical output or seamless integration.

Purpose of the Study:

To develop a novel microfluidic pressure sensor fully integrable with PDMS.
To achieve direct electrical signal generation from the sensor.
To characterize the sensor's performance in terms of response time, pressure range, and resolution.

Main Methods:

Integration of PDMS-based conductive composites into a 30 µm thick membrane.
Bonding the membrane to the microchannel sidewall.

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Utilizing standard photolithographic processes for fabrication.

Main Results:

The sensor directly produces electrical signals.
Achieved a response time of approximately 100 ms.
Operates over a wide pressure range (0-100 kPa) with a resolution of 0.1 kPa, improving to 0.01 kPa at high pressures due to a quadratic resistance-pressure relationship.

Conclusions:

The PDMS-based sensor offers perfect bonding with PDMS microfluidic chips.
The fabrication process allows for one-time creation of 3D structures and microsensor arrays.
Theoretical calculations align well with experimental findings, validating the sensor's design and performance.