You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Jun 15, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A novel omnidirectional spatial filter effectively detects defects in periodic patterns by distinguishing spectral differences. This optical system offers immunity to shifts, rotations, and magnification for defect detection in various patterns.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: