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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Guided-mode resonance filters with shallow grating.

Wenxing Liu¹, Zhenquan Lai, Hao Guo

¹Department of Physics, Nanchang University, Nanchang 330031, China.

|March 19, 2010

Summary

A novel shallow grating triple-layer guided-mode resonance (GMR) filter offers narrow bandwidth and symmetrical line shape. Its spectral width is tunable by adjusting grating thickness and period for optimized optical filtering applications.

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Area of Science:

Photonics and Optical Engineering
Materials Science

Background:

Guided-mode resonance (GMR) filters are crucial optical components.
Existing GMR filters often face challenges with spectral line shape and sideband reflections.

Purpose of the Study:

To present a novel shallow grating triple-layer GMR filter.
To investigate the properties and tunability of this GMR filter design.

Main Methods:

Fabrication of a triple-layer GMR filter with a shallow grating.
Optical characterization of the filter's spectral response.
Analysis of the impact of grating thickness and period on filter performance.

Main Results:

The shallow grating GMR filter exhibits narrow bandwidth and symmetrical spectral line shape.
Low-reflection sidebands were achieved in the filter's performance.
Spectral Full Width at Half Maximum (FWHM) is controllable via grating thickness.
Grating period adjustment, with constant layer thickness, further refines FWHM and line shape.

Conclusions:

The shallow grating triple-layer GMR filter provides excellent spectral characteristics.
This design offers a tunable platform for precise optical filtering.
The findings enable optimized GMR filter performance for various photonic applications.