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Published on: July 18, 2015
Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography
Uriel Levy1, Boris Desiatov, Ilya Goykhman
1Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, Israel. ulevy@cc.huji.ac.il
Abstract:
We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.
