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Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis

Sven Schröder1, Tobias Herffurth, Marcus Trost

  • 1Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Strasse 7, D-07745 Jena, Germany. sven.schroeder@iof.fraunhofer.de

Applied Optics
|March 20, 2010
PubMed

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