SU-8-based immunoisolative microcontainer with nanoslots defined by nanoimprint lithography

Joonbum Kwon1, Krutarth Trivedi, Nemani V Krishnamurthy

  • 1Department of Electrical Engineering, University of Texas at Dallas, Richardson, Texas 75080.

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures : Processing, Measurement, and Phenomena : an Official Journal of the American Vacuum Society
|March 20, 2010
PubMed

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