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Related Experiment Video

Updated: Jun 14, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
12:14

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Published on: August 12, 2013

Precision of ellipsometer nulling.

U Merkt

    Applied Optics
    |March 24, 2010
    PubMed
    Summary

    A new least squares method precisely nulls ellipsometer arrangements, calculating null setting errors. This method simplifies analysis for common PCSA and PSCA ellipsometers, accounting for noise and sample properties.

    Area of Science:

    • Optical Physics
    • Metrology

    Background:

    • Ellipsometry is a powerful optical technique for characterizing thin films and surfaces.
    • Precise nulling is crucial for accurate ellipsometric measurements.
    • Existing methods may lack generality or simplicity for arbitrary arrangements.

    Purpose of the Study:

    • To present a least squares method for precise nulling of arbitrary ellipsometer arrangements.
    • To calculate the standard errors of the null settings.
    • To apply the method to common ellipsometer configurations (PCSA, PSCA).

    Main Methods:

    • Development of a general least squares method for nulling.
    • Calculation of standard errors for null settings.
    • Application and simplification of formulas for PCSA and PSCA arrangements.

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    Main Results:

    • General expressions for nulling and standard errors derived.
    • Simple closed-form formulas obtained for PCSA and PSCA ellipsometers.
    • Formulas reveal the impact of light noise, extinction ratio, and sample properties (reflectivity, ellipsometric angles).
    • Analysis of coupling effects, showing minimal impact on precision with the least squares method for PSCA.

    Conclusions:

    • The presented least squares method offers precise nulling for arbitrary ellipsometers.
    • The derived formulas provide insights into error sources and their influence on measurement precision.
    • The method is robust and simplifies analysis for standard ellipsometer configurations.